Laser Lithography for Semiconductor Roadmap

Advanced Lithography: Nanoimprint Lithography for Semiconductor and Interconnect Technologies

Roadmap on semiconductor-cell biointerfaces.

This roadmap outlines the role semiconductor-based materials play in understanding the complex biophysical dynamics at multiple length scales, as well as the design and implementation of next-generation electronic, optoelectronic, and mechanical devices for biointerfaces. The roadmap emphasizes the advantages of semiconductor building blocks in interfacing, monitoring, and manipulating the acti...

Lithography Simulation in Semiconductor Manufacturing

In the 30 years since lithography modeling was first introduced, optical lithography simulation has progressed from a curiosity, to a research and development tool, and finally to a manufacturing tool. While much has been published on new developments in lithography simulators and their use in advanced lithography development, less is published on how simulators have been used and are soon to b...

Simulation of Semiconductor Lithography and Topography

A brief perspective is given initially on the goals, exposure methods, performance and challenges in the lithography process. The basic framework for simulating optical lithography is then presented using three important physical aspects: imaging, resist exposurebleaching and resist development etching. Image quality in both contact/proximity and projection printing are considered. The verifica...

Simulation of Semiconductor Lithography and Topography

Process flow simulation TCAD tools are used in this chapter to show how the planar process converts the layout into the device and interconnect structures. A good test of the working knowledge of a new process engineer or even a circuit designer is to hand them a circuit layout and ask them to sketch the device cross section. This requires an understanding of the ordering and patterning various...